Dry Vacuum Pump GR Series

GR90

Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.

 

 

 

 

 

 

 

 

 

Features

  • Particularly useful for high load applications such as repeated pump down between atmospheric pressure and vacuum and continuous running in the high pressure range.
  • Useful for load/unload lock chambers which require high throughput.
  • A universal induction motor is used. An explosion proof motor is avaialble as an option.
  • For motor power. Specify voltage  required when ordering. Either 200 VAC Class or Multiple voltage motors are available.

Applications

  • Clean gas vacuum pumping such as air, inert gas.
  • Load/unload lock chambers of various types of deposition equipment.
  • General industrial applications such as vacuum dryer, vacuum gas exchange in vacuum heat insulation and gas charging, vacuum degassing, etc.

Specifications

Model
GR60A

GR90A

GR180A
Hz50Hz60Hz50Hz60Hz50Hz60Hz
Maximum pumping speedm3/h

62

80112126183237
L/min103013331860210031003950
cfm36.447.165.774.2109.5

139.5

Ultimate pressure

5.0Pa *1
3.7 x 10-2Torr *1
5.0 x 10-2mbar *1
Maximum inlet pressureAtmospheric pressure
Maximum exhaust pressure1.0Pa to Atmospheric pressure
7.5 x 10-3Pa to Atmospheric pressure
1.0 x 10-2mbar to Atmospheric pressure
Inlet portVG50 or ISO63FEquivalent to VG80 or ISO80F 
Outlet portNW40
Surface treatmentStandard option
Weight

128kg

188kg

268kg

Cooling waterSupply pressure0.1 to 0.3MPa
14.5 to 43.5psi
In/Out difference pressure>0.1MPa
>14.5psi
Temperature10 to 30ºC *2
50 to 86℃
Flow rate>5.0L/m
N2
Primary side supply pressure
0.1 to 0.5MPa
14.5 to 72.5psi

Secondary side

regulated pressure *3

0.05 to 0.1 (at running)
7.3 to 14.5psi
Shaft
5SLM *4

*1 Ultimate pressure is the value when the nitrogen gas (shaft seal gas) is at 5.0SLM.

*2 Non condensing.

*3 Value indicated on pressure gauge is adjusted by a gas regulator.

*4 Flow rate of nitrogen gas (shaft seal gas) is fixed at 5.0SLM.

 

■  Specify a motor voltage from following table when ordering.

     Either a 200 Volt class motor or a multiple volt motor

Model
GR60A
Selectable motor200V class motorMultiple voltage motor
Frequency
Hz

50

60
5060
50
60
Voltage
V

200

200
220
220
240
208
220
240
380
400
415
380
440
460
Rated currentA9.28.88.18.18.18.58.17.44.84.84.74.64.34.1
WiringDelta wiringDelta wiringStar wiring

 

 ModelGR90A
Selectable motor200V class motorMultiple voltage motor
Frequency
Hz

50

60
5060
50
60
Voltage
V

200

200
220
220
240
208
220
240
380
400
415
380
440
460
Rated currentA14.214.112.812.812.713.412.811.87.57.47.37.376.3
WiringDelta wiringDelta wiringStar wiring

 

Model
GR180A
Selectable motorCommon multiple volt motor available for this pump
Frequency
Hz

50

60
50
60
Voltage
V

200

200
240
200
208
220
240
380
400
415
380
440
460
Rated currentA26.125.125.726.324.923.922.514.514.714.913.913.312.5
WiringDelta wiringStar wiring

Data download

To download drawing data and I / O data, advance user registration (free) is required.
Those who do not have user registration please register from the user registration page.

 

FEATURES
Dry Vacuum Pump  GR Series