High-Speed Spectroscopic Ellipsometer Automated UNECS-3000

UNECS-3000A IS HIGH-SPEED SPECTROSCOPIC ELLIPSOMETER WHICH CAN MEASURE THICKNESS AND OPTICAL PARAMETERS OF THIN FILMS BY SNAP SHOT MEASUREMENT METHOD WITH AUTOMATED MAPPING. USERS CAN ACHIEVE HIGHLY ACCURATE MEASUREMENT RESULTS. IT CAN BE USED FOR VARIOUS APPLICATIONS FROM R&D TO MASS PRODUCTION.

 

 

APPLICATIONS

• Measure transparent or semitransparent thin film thicknesses and optical parameters on substrates less than or equal to f300mm (Oxide film, nitride film, photo resist film, ITO, etc)

FEATURES

• Automated Mapping Function – Measure and provide the film thickness and optical parameter distribution of a f300mm substrate automatically with programmable R-ustage. Moreover, the result of measurements can be displayed in a color map.
• High-speed Measurement – The snapshot measurement method is realized by spectroscopic ellipsometry in conjunction with high-order wave plates. Measurement time is 20ms per data point.
• Excellent Cost-performance – The UNECS-3000A comes equiped with the main measurement unit a laptop PC, and data analysis software. The main measurement unit offers automated mapping as auto height adjustment.
• Customized Material Tables – Users can easily edit and add material table files
• Multilayer Measurement – It’s possible to measure multilayer film thicknesses

FEATURES
High-Speed Spectroscopic Ellipsometer Automated UNECS-3000