This is a wide range pirani gauge which measures from atmospheric pressure to 5×10-2 Pa (3.75×10-4 Torr, 5×10-4 mbar) Platinum wire is used for filaments , therefore, the filament will function even at atmospheric pressure.
Wide-range Measurement Measures from atmospheric pressure to 5×10-2 Pa (3.75×10-4 Torr, 5×10-4 mbar)
Power Supply Voltage Powered with 24VDC or 100VAC to 240VAC input
Shock Resistant Design is highly resistant to shock
Filament Material: platinum (Pt) Corrosion-resistant platinum is used as the filament material
High Visibility LEDs Used for Error Display
One-touch Adjustment Atmospheric adjustment and the zero point adjustment can be done with one-touch
Maintainability Sensor head can be replaced easily
Measured Value Output Signal Pressure is 0 to 10V Log output
Control Output Signal 3 set point output
Serial Communication Spec RS485 communication (ISG1)
Display Unit With visble LED
Certification Conforms with CE
SPECIAL FEATURES / FURTHER APPLICATIONS
Process control in low vacuum range of vacuum equipment such as that used for semiconductor, optics and Photovoltaic field, FPD, electronic parts manufacturing
Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
Process control in low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment
For pumping unit (system) which it has a vibration and/or shach in the manufacture process
