Batch-type Sputtering System SX Series

sx-200

Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.

Features

  • Auto control for vacuum pumping and deposition by PC
  • Designed for co-sputtering method application (optional item by adding power supply)
  • Logging data by PC

Applications

  • Reserch and development
  • Small and medium production

For more Information

FEATURES
Batch-type Sputtering System SX Series