| Pressure range | to 10-5Pa | |
| Wafer size | 200mm/300mm | |
| Number of wafer | 1 or 2 | |
| Maximum distance* | 880mm | |
| Rotation | -15º to 375º | |
| Z-axis stroke | - | |
| Minimum rotation diameter * | 802mm | |
| Weight capacity (hand is included) | 1kg | |
| Speed | R | Max 2.5sec / full stroke |
| θ | Max 2.5sec / 180º | |
| Z | - | |
| Position Accuracy | R | ±0.2mm |
| θ | ±0.2mm | |
| Z | - | |
| Teaching pendant | Option | |
| Controller | Built-in type | |
*Changes by the arm and hand.
