Dry Vacuum Pump GR Series

GR90

Based on many years of experience with the LR/HR Series ULVAC has introduced the GR Series Dry Vacuum pump with a simple and clean design for general industrial applications.

Features

Particularly useful for high load applications such as repeated pump down between atmospheric pressure and vacuum and continuous running in the high pressure range.
Useful for load/unload lock chambers which require high throughput.
A universal induction motor is used. An explosion proof motor is avaialble as an option.
For motor power. Specify voltage required when ordering. Either 200 VAC Class or Multiple voltage motors are available.

Applications

Clean gas vacuum pumping such as air, inert gas.
Load/unload lock chambers of various types of deposition equipment.
General industrial applications such as vacuum dryer, vacuum gas exchange in vacuum heat insulation and gas charging, vacuum degassing, etc.

Specifications

Model		GR60A		GR90A		GR180A
Hz		50Hz	60Hz	50Hz	60Hz	50Hz	60Hz
Maximum pumping speed	m³/h	62	80	112	126	183	237
	L/min	1030	1333	1860	2100	3100	3950
	cfm	36.4	47.1	65.7	74.2	109.5	139.5
Ultimate pressure		5.0Pa *1
		3.7 x 10^-2Torr *1
		5.0 x 10^-2mbar *1
Maximum inlet pressure		Atmospheric pressure
Maximum exhaust pressure		1.0Pa to Atmospheric pressure
		7.5 x 10^-3Pa to Atmospheric pressure
		1.0 x 10^-2mbar to Atmospheric pressure
Inlet port		VG50 or ISO63F		Equivalent to VG80 or ISO80F
Outlet port		NW40
Surface treatment		Standard option
Weight		128kg		188kg		268kg
Cooling water	Supply pressure	0.1 to 0.3MPa
		14.5 to 43.5psi
	In/Out difference pressure	>0.1MPa
		>14.5psi
	Temperature	10 to 30ºC *2
		50 to 86℃
	Flow rate	>5.0L/m
N2	Primary side supply pressure	0.1 to 0.5MPa
		14.5 to 72.5psi
	Secondary side regulated pressure *3	0.05 to 0.1 (at running)
		7.3 to 14.5psi
	Shaft	5SLM *4

*1 Ultimate pressure is the value when the nitrogen gas (shaft seal gas) is at 5.0SLM.

*2 Non condensing.

*3 Value indicated on pressure gauge is adjusted by a gas regulator.

*4 Flow rate of nitrogen gas (shaft seal gas) is fixed at 5.0SLM.

■ Specify a motor voltage from following table when ordering.

Either a 200 Volt class motor or a multiple volt motor

Model		GR60A
Selectable motor		200V class motor			Multiple voltage motor
Frequency	Hz	50	60		50		60			50			60
Voltage	V	200	200	220	220	240	208	220	240	380	400	415	380	440	460
Rated current	A	9.2	8.8	8.1	8.1	8.1	8.5	8.1	7.4	4.8	4.8	4.7	4.6	4.3	4.1
Wiring		Delta wiring			Delta wiring					Star wiring

Model		GR90A
Selectable motor		200V class motor			Multiple voltage motor
Frequency	Hz	50	60		50		60			50			60
Voltage	V	200	200	220	220	240	208	220	240	380	400	415	380	440	460
Rated current	A	14.2	14.1	12.8	12.8	12.7	13.4	12.8	11.8	7.5	7.4	7.3	7.3	7	6.3
Wiring		Delta wiring			Delta wiring					Star wiring

Model		GR180A
Selectable motor		Common multiple volt motor available for this pump
Frequency	Hz	50			60				50			60
Voltage	V	200	200	240	200	208	220	240	380	400	415	380	440	460
Rated current	A	26.1	25.1	25.7	26.3	24.9	23.9	22.5	14.5	14.7	14.9	13.9	13.3	12.5
Wiring		Delta wiring							Star wiring

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