Dry Vacuum Pump LR/HR/UR Series

lr_hr

ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series  to perform even in the most stringent processes. ULVAC has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications. 
ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.

Features

  • Low temperature pumps : The LR series pump is designed for either load lock or PVD processes.
  • ULVAC's unique aluminum design allows for very uniform temperature distribution throughout the pump body :  The HR aeries pump is designed for CVD and etch processes.
  • ULVAC UR series pump is designed for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
  • Excellent helium pumping capability :  Canned motor for safety and ease of maintenance
  • Power failure protection :  Pump withstands power interruptions of up to 1000ms duration.
  • Superior corrosion resistance :  Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when
    exposed to corrosive gasses.
  • Communication function :  Pump data including warnings and alarms are able to be exported. Extensive pump control is available.
  • CE marking is available :  CE marking is available upon request.

Applications

  • Pump is designed for CVD or dry etching applications
  • Pump is designed for PVD, evaporation, or heat treatment processes
  • Reduction of exhaust time for LL chamber (LR series)
  • Pump is designed to handle process gasses that generate powder by products such as Si crystal growing furnaces
  • Backing pump for turbo-molecular pumps and mechanical booster pumps

Specifications

 

ModelLR/HR
60		LR/HR
90		LR
180		LR
421		LR
421-T		UR
421-T		LR/HR
300		LR/HR
600		UR
600		LR/HR
1200		UR
1200
PumpDRPLR/HR
60		LR/HR
90		LR
180		LR
421		LR
421-T		UR
421-T		LR/HR
60		LR/HR
90		UR
90		LR/HR
90		UR
90
MBP－PRC-003APRC-006APRC-012A
Max. pumping speedm3/h50Hz6211218344044041035965365310121012
60Hz801262373657011051
L/min50Hz103018603100733373336833598010900108831690016867
60Hz13332100395060801170017500
Ultimate pressurePa5.00.67
Max. inlet pressureAtmospheric pressure ＊
Max. exhaust pressure1.0 to Atmospheric pressure
Inlet diameter (type CE)

VG50 (KF40)

VG80(KF50)VG100VG80(KF80)VG100(KF100)
Outlet diameterKF40VG50KF40
DRP: Rotor blade surface treatment○○○○○○○○○○○
MBP: Rotor blade surface treatment------○ *○ *○○ *○
Weightkg180245335415251371403
PowerThree phaseVAC
(Hz)		200（50/60), 220(60)180～240/380～440（50/60）200（50/60), 220(60)
CurrentAt ultimate pressureA6.9/
7.1		11.218.920.8237.0/
7.8		12.3/
12.9		16.413.7/
15.4		18.9
At max. loadA7.0/
7.3		11.820.648.552.59.6/
8.1		19.0/
13.8		17.324.2/
18.9		22.4

Cooling water
Supply pressure

MPa0.1 to 0.30.2 to 0.50.1 to 0.3

Cooling water
In/Out differrence
pressure

MPa＞0.1＞0.2＞0.1

Cooling water
Flow rate

L/min＞5.0＞4.0＞5.0＞5.0
N2 gasSupply pressureMPa0.1 ～ 0.5
Regu-
lated pressure		MPa0.05 ～ 0.1
N2purgeShaft purgeSLM5
Gas ballastSLM0～45None *10～450～1950～45

*Please specify voltage at the time of ordering. 
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature. 
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).    
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
* ○=with　　×=with out
* MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
* Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotion.

 

ModelLR1800UR1800LR3601LR3601-TTLR3601-RLR3601-TR(TTR)UR3601-TT
PumpDRPLR180UR180LR421LR421-TLR421LR421-TUR421-T
MBPPRC-018APRC-036CPRC-036C(-T）PRC-036DPRC-036D（D-T）PRC-036C-T
Max. pumping speedm3/h50Hz1701170132002700
60Hz1784
L/min50Hz28350283505333345000
60Hz29700
Ultimate pressurePa0.67
Max. inlet pressureAtmospheric pressure ＊
Max. exhaust pressure1.0 to Atmospheric pressure
Inlet diameter (type CE)VG100(KF100)VG150(KF100)VG150
Outlet diameterKF40KF50
DRP: Rotor blade surface treatment○○○○○○○
MBP: Rotor blade surface treatment○ *○×T：×　TT：○×TR：×　TTR：○○
Weightkg553660720660720720
PowerThree phaseVAC(Hz)200（50/60),220(60)180～240/380～440（50/60）
CurrentAt ultimate pressureA21.429.23135.439.8
At max. loadA39.834.958.48268.3
Cooling water
Supply pressure		MPa0.1 to 0.30.2 to 0.5
Cooling water
In/Out differrencepressure		MPa＞0.1＞0.2
Cooling water
Flow rate		L/min＞5.0＞4.0＞5.0
N2 gasSupply pressureMPa0.1 ～ 0.5
Regula-
ted pressure		MPa0.05 ～ 0.1
N2 purgeShaft purgeSLM5
Gas ballastSLM0～450～195None *10～45None *10～450～195

*Please specify voltage at the time of ordering. 
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature. 
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).    
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
* ○=with　　×=with out
* MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
* Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotion.

 

■Silencer (Option)

ModelMaterialSurface treatmentWeight (kg)Flange Connection
RS-01SUS304GBB treatment4.1KF40
RS-02SUS304GBB treatment8.3KF40
RS-03SUS304Polished plate12.5KF50

 

■Acceptable Table

Kit typeAgreementClampOuter ringConnection FlangeStay
RS-01 kitALR60,LR90,LR30011--
RS-01 kitBLR600,LR12002211
RS-02 kitALR180（LR60,LR90,LR300）2211
RS-02 kitBLR1800（LR600,LR1200）2211
RS-03 kitALR421(-T)1111
RS-03 kitBLR3601(-T/TT/R/TR/TTR）3311

Data download

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Those who do not have user registration please register from the user registration page.

 

FEATURES
Dry Vacuum Pump LR/HR/UR Series