■High pumping speed"
　　●High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
■Low power consumption
　　●ECO-SHOCK technology realizes low power consumption (C Type)
　　●Power consumption at the ultimate pressure is the industry-leading 0.6kW or less(LS120A-C)
■Low noise

　　●Built-in silencer achieves the noise level 61dB(A) or less
■Low running-cost
　　●No shaft sealing gas
※Purge gas is available with L Type.
■4 kinds of model
　　●Pumping speed120～1200m3/h Class　※With mecanical booster pump
　　●Model is selectable with the optimum pumping speed according to the application

2 types for specific application
　C Type：Clean process　（LS***A-C）
　　　Feature：Low power consumption model (with built-in ECO-SHOCK)
　　　Applications：For clean process such as air and N2
　　　　　　　 Sputtering/Vapor deposition/Lamination/Load lock room/TMP backing pump etc.
　L Type：Light process（LS***A-L）
　　　Features：Light process model (with surface treatment and purge function)
　　　Applications：For light process such as steam and volatile liquid medicine
　　　　　　　　Vacuum drying/Freeze drying/Ashing/General industrial use etc.