ELEC-RZ is the wafer transfer robot in the high vaccum environment, implemented with compact and low cost based on outstanding function and performance of COVOT series.
Features
Magnetic fluid sealing is adopted as a vacuum seal, and it corresponds to the high vacuum to 10-6Pa.
Achieved a compact design by miniaturizing the actuator enables easy impelementation to the equipment.
Offers variety of arms with various strokes, number of hands and turning radii.
Achieved excellent operability by adopting with the multi-function display teaching pendant.
Applications
Automatic wafer transfer for various semiconductor equipments
Wafer transfer for various vacuum eqipment for R&D
