EWA Series | EWE Series | EWD Series | |
Application | Packaging materials, gold/silver thread | Capacitors | |
Evaporation source | High-frequency induction heating | Resistance heating | |
Substrate material | PET, OPP, PVC, CPP and other macromolecular films, paper, metal foil, others | ||
Substrate size (width) | 3,000 mm max. | 670 mm max. | 670 mm max. |
Winding rate | 1,000 m/min max. | 1,200 m/min max. | |
Film thickness distribution | ±5% (varies according to deposition conditions) | ||
Film thickness monitors | Transmission monitor, eddy current monitor, contact-type resistance value monitor, others | ||
Pre-/post-process mechanisms | Substrate heating, AC/DC bombardment, RF bombardment, others | ||
Main evacuation systems | Oil diffusion pump, oil diffusion ejector pump |
EWD Series EWE Series