A pressure sensor unit that is adopting a semiconductor type thin- film element . By this can measure near to the atmosphericpressure (Gaugepressure: -100kPa~10kPa) with high accuracy. To be compatible for a high vacuum pressure SUS316L is adopted.
Corresponding to the continuous use of high vacuum pressure process.: Semiconductor t ype thin- f i lm element i s adopted to be compatible for a high (SUS316L)
Suitable for atmosphere pressure check: Pressure standard is corresponding with gauge pressure and a high accuracy measurement is capable
Measurement output signal: Pressure is set to DC 0 to 5V Log out signal as a standard
Rotate Generator: Compatible in wide for DC12 to 24V
Quick coupling standard: Adopting a NW16 port
SPECIAL FEATURES / FURTHER APPLICATIONS
To confirm the atmospheric pressure of PV, FPD, SEMICONDUCTOR system which contain high vacuum components
To conf i rm the atmospheric pressure of Indust rial Vacuum Equipment like furnace systems which contain high vacuum components
To the vacuum system that require the high accuracy measurement of -100kPa~10kPa Gauge pressure (Absolute pressure：10+4~10+5Pa )
