APPLICATIONS
• Measure transparent or semitransparent thin film thicknesses and optical parameters on substrates less than or equal to f300mm (Oxide film, nitride film, photo resist film, ITO, etc)
FEATURES
• Automated Mapping Function – Measure and provide the film thickness and optical parameter distribution of a f300mm substrate automatically with programmable R-ustage. Moreover, the result of measurements can be displayed in a color map.
• High-speed Measurement – The snapshot measurement method is realized by spectroscopic ellipsometry in conjunction with high-order wave plates. Measurement time is 20ms per data point.
• Excellent Cost-performance – The UNECS-3000A comes equiped with the main measurement unit a laptop PC, and data analysis software. The main measurement unit offers automated mapping as auto height adjustment.
• Customized Material Tables – Users can easily edit and add material table files
• Multilayer Measurement – It’s possible to measure multilayer film thicknesses
