High-Speed Spectroscopic Ellipsometer Compact UNECS 2000

UNECS-2000 IS BASED ON SPECTROSCOPIC ELLIPSOMETRY UTILIZING HIGH-ORDER WAVEPLATES. IT IS ULVAC’S NEWEST SPECTROSCOPIC ELLIPSOMETER, WHICH OFFERS THE HIGH-SPEED IN A COMPACT SIZE. IT OFFERS EXCELLENT COST PERFORMANCE, WHICH WAS IMPOSSIBLE WITH CONVENTIONAL SPECTROSCOPIC ELLIPSOMETERS. ITS MOTORIZED STAGE CAN MEASURE SAMPLES UP TO F200MM. USERS FIND IT EASY TO USE FOR ACCURATE RESULTS. IT CAN BE USED FOR VARIOUS APPLICATIONS SUCH AS R&D AND MANUFACTURING LINES ETC.

APPLICATIONS

• Measurement of transparent or semitransparent thin films on substrates up to f200mm (Oxide film, nitride film, photo resist film, ITO, etc.)

FEATURES

• High-speed Measurement – High-order waveplates are used to generate the spectrum carrying information about the wavelength-dependent multiple parameters of polarized of light. It requires no mechanical or active components for polarization-control, such as a rotating compensator and electro-optic modulator. Its snapshot method makes high-speed measurements possible.

• Compact Design – The size of the emitter and receiver of the sensor unit are very small due to the use of high-order retarders. The built-in light source and controller are mounted in a designed compact enclosure.

• Excellent Cost-performance – Included is a f200mm motorized stage, a laptop PC with data analysis software.Users can enjoy excellent cost performance benefits.

• Customized Material Tables – Users can easily edit and add material table files.

• Multi-layer Measurement – It’s possible to measure multilayer film thickness of up to 6 layers.