Holizontal In-line Type Sputtering System SCH Series
The SCH Series are horizontal in-line sputtering systems for deposition of transparent conductive films and other metal films. They can be used to depositi films such as back conatct and barrier layers in solar cell production lines.
Features
Demonstrated high reliability in many mass-production lines
Flexibility in size and number of substrates
High deposition rate & high efｆiciency cathode
Applicable to a broad range of deposition methode (Depo-down/Depo-up, DC/AC/RF sputtering)
Simple and easy maintenance
Applications
Transparent conductive, back contact, precursor, buffer layer for solar cells
