This unique instrument uses the thermo-reflectance method to determine the cross-plane thermal conductivity of nano thin film samples.
APPLICATIONS
• Quantify the thermal resistance of low-k insulating films for the thermal design of semiconductor devices
• Developing insulating films and improving heat radiation
FEATURES
• Capable of measuring the thermal conductivity of 20 to 1000 nm thin films formed on substrates in the normal direction
• Implements measurements by temperature amplitude detection using the thermo-reflectance method
• Sample pre-processing is simple
