Sputtering Coating Machine (Roll Coater Type) SPW Series

SPW165

SPW Series is a equipment that can be sputtered optical thin film and metal etc multilayer film on plastic film.

Gas separation chanber for batch processing of high-function multilayer films.

Features

【SPW-030】

  • Various modules for different processes and production volumes.
  • Can be applied to various applications by selecting and adding modules.
  • Can be operated at floor level.
  • Excellent gas separation performance and improved sputtering process enable rapid deposition of high grade films.

【SPW-165】

  • Various modules for different processes and production volumes.
  • Can be applied to various applications by selecting and adding modules.
  • Can be operated at floor level.
  • Excellent gas separation performance and improved sputtering process enable rapid deposition of high grade films.

Applications

  • FPD reflection-reducing films/transparent electrode films/shield films/high barrier films
  • FPC electrode films
  • Magnetic films/protective films for magnetic recording media

Specifications

 SPW-030SPW-060SPW-165 C1SPW-165 C2
Target MaterialITO, Nb2O5, SiO2, Cu and Metal
Web WidthMax300mmMax750mmMax1600mm
Web Thickness（μm）25 to 200
Web MaterialPET, PI, PC, COP and Others
W/UW Max Diameterφ300mmφ400mm /φ700mmφ900mm
Winding Speed（m/min）0.5 to 5.00.1 to 100.5 to 10
Cathode StructureExternalExternal / InternalInternal
Number of Cathode4sets8sets16sets
4Pair8Pair
Power SupplyDC or AC
Numbar of Main Roller1set2sets
MR Temp-5 to 180ºC-20 to 80ºC-20 to 100ºC
-10 to 180ºC
OptionBombard system, Ion Gun and Others

 

FEATURES
Sputtering Coating Machine (Roll Coater Type) SPW Series