TURBO MOLECULAR PUMP UTM-FH, FW SERIES

The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled, and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle to hard processes.

Zoom

Abundant variations from 350L/s to world's largest 6300L/s
(digital magnetic controlled bearing type).
Maintainable stable pumping performance against change of
back pressure (FH series).
Optional internal heating system to control rotor temperature
and reduce adhesion of side reaction by-products (FW series).
Excellent anti-corrosion surface treatment (excluding 3303FH
and 6300FH). Optional special surface treatments (e.g. Nickel
plating + cation electrodeposition, special deposited film,
aluminum anodization) are available as necessary.
Mountable in all direction.
Variable speed system makes it possible to change the
pumping speed in the range from 25% through 100%.
There is no limitation to combine any power supply and pump
main unit to change cable length because of using coupling
free system and tuning free system.
Self power generation by regenerative energy is used for
backup power supply at power outage by using battery free
system. Troublesome battery replacement is not necessary.
Built-in monitoring/self-diagnostic and communication functions
enable to configure centralized monitoring system.
Safety design with fracture energy absorption construction
can reduce damage on vacuum system when trouble
happened with the pumps.
High durability and high reliability have been realized by
experiments such as air rushing-in testing, various touching
down testing, forced destruction testing for rotor and foreign
material drop testing (Si wafer fall).

SPECIAL FEATURES / FURTHER APPLICATIONS

[UTM-FH series]
Main evacuation of light to middle processes such as
evaporator, sputtering system, dry etching, etc. where
there are not any side reaction by-products
Pumping system of analytical instrument, R&D system,
laboratory equipment, etc.
Pumping system for those equipment and system for
light gas such as H2 and He
Multiple turbo molecular pumps with centralized back
pump configuration
[UTM-FW series]
Main evacuation of middle to hard processes such as
dry etching, CVD system, etc.
High flow gas evacuation for dry etching, CVD system,
sputtering system, etc.
Main evacuation of analytical instrument, R&D system,
laboratory equipment, etc.

TURBO MOLECULAR PUMP UTM-FH, FW SERIES

Zoom

Abundant variations from 350L/s to world's largest 6300L/s
(digital magnetic controlled bearing type).
Maintainable stable pumping performance against change of
back pressure (FH series).
Optional internal heating system to control rotor temperature
and reduce adhesion of side reaction by-products (FW series).
Excellent anti-corrosion surface treatment (excluding 3303FH
and 6300FH). Optional special surface treatments (e.g. Nickel
plating + cation electrodeposition, special deposited film,
aluminum anodization) are available as necessary.
Mountable in all direction.
Variable speed system makes it possible to change the
pumping speed in the range from 25% through 100%.
There is no limitation to combine any power supply and pump
main unit to change cable length because of using coupling
free system and tuning free system.
Self power generation by regenerative energy is used for
backup power supply at power outage by using battery free
system. Troublesome battery replacement is not necessary.
Built-in monitoring/self-diagnostic and communication functions
enable to configure centralized monitoring system.
Safety design with fracture energy absorption construction
can reduce damage on vacuum system when trouble
happened with the pumps.
High durability and high reliability have been realized by
experiments such as air rushing-in testing, various touching
down testing, forced destruction testing for rotor and foreign
material drop testing (Si wafer fall).

SPECIAL FEATURES / FURTHER APPLICATIONS

[UTM-FH series]
Main evacuation of light to middle processes such as
evaporator, sputtering system, dry etching, etc. where
there are not any side reaction by-products
Pumping system of analytical instrument, R&D system,
laboratory equipment, etc.
Pumping system for those equipment and system for
light gas such as H2 and He
Multiple turbo molecular pumps with centralized back
pump configuration
[UTM-FW series]
Main evacuation of middle to hard processes such as
dry etching, CVD system, etc.
High flow gas evacuation for dry etching, CVD system,
sputtering system, etc.
Main evacuation of analytical instrument, R&D system,
laboratory equipment, etc.

FEATURES